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HORIBA光纖型化學(xué)藥液濃度計CS-600F-1P25P5可以在單槽或單晶圓清洗系統(tǒng)中檢測多種化學(xué)藥液

發(fā)布時間:2025/02/13 14:20:23 發(fā)布廠商:北崎國際貿(mào)易(北京)有限公司 >> 進入該公司展臺


CS-600F

Fiber Optic Type Chemical Concentration Monitor CS-600F

光纖型化學(xué)藥液濃度計

CS-600F 提供適合生產(chǎn)的更高級功能,如在各種應(yīng)用中對高溫化學(xué)藥液進行在線測量的能力,減少停機時間的穩(wěn)定運行,以及提高空間生產(chǎn)率的緊湊尺寸,以滿足*半導(dǎo)體濕法制程所需的準確化學(xué)藥液濃度管理。

事業(yè)部: 半導(dǎo)體
產(chǎn)品分類: 濕法過程控制
制造商: HORIBA Advanced Techno Co., Ltd.
  • 尺寸更小,布局更靈活
    CS-600F 濃度計尺寸緊湊,與成熟型號(CS-100F1 系列)相比,高度降低 36%,體積減少 40%,樣品單元光纖電纜所需的空間減少 46%。
    光源單元和濃度計主機可以遠程單獨安裝,支持根據(jù)化學(xué)藥液單元和清洗設(shè)備的位置靈活安裝。
  • 高溫化學(xué)溶液(20 至 80℃)的高穩(wěn)定性在線測量
    新的光學(xué)系統(tǒng)和改進的處理算法支持在線測量高溫化學(xué)藥液,這是*濕法制程的關(guān)鍵一步。這消除了冷卻化學(xué)樣品的需要。HORIBA 的 CS-600F 穩(wěn)定性高,實現(xiàn)了更有效和準確的化學(xué)藥液管理。
  • 背景校正頻率顯著降低
    與成熟型號(CS-100F1系列)相比,定期校正頻率顯著降低,這反過來又顯著減少了機臺停機時間,有助于提高產(chǎn)量。
  • 單臺濃度計可測量多達六種化學(xué)藥液(藥液種類或濃度范圍)
    單臺濃度計可測量多達六種化學(xué)藥液(藥液種類或濃度范圍)??勺杂伤幰侯愋秃蜐舛确秶?,CS-600F 保證滿足各種檢測要求。
  • 可輸出多達六種組分的測量值(串行輸出)
    成熟型號(CS-100F1 系列)可輸出四種組分的測量值(串行輸出)。CS-600F*號能以串行輸出方式輸出多達六種組分的測量值。CS-600F型號模擬輸出四種組分,而CS-100F1型號為兩種。
Model CS-600F
Measurement
principle
Absorption spectroscopic method
Calculation
principle
Temperature compensation type multivariate analysis
Measurement target NH3/H2O2/H2O (reperesentative specification)
* Please contact HORIBA regarding other chemicals.
Measurement range NH3:0.00~1.20mass%、H2O2:0.00~5.50mass%、
H2O:93.3~100.0mass%
Repeatability NH3:±0.05mass%、H2O2:±10mass%、H2O:±1.0mass%
Chemical temperature: Within ±1℃/1 hour
Sample solution
temperature
20?80℃
Measurement cycle Approx. 3 seconds
LCD
display
(1) Measured value (%)
(2) Concentration alarm (HH/H/L/LL)
(3) Error code (EXXX)
(4) Chemical temperature (°C)
(5) Serial/parallel communication status (P/S)
(6) The times of background correction failure (CXXX)
Key input (1) Concentration alarm setting (HH/H/L/LL)
(2) Concentration value shift
(3) Background correction
(4) Hot water correction
(5) Temperature dependent concentration shift
Parallel
input
Input voltage of 12 V to 30 V DC by insulating with photo coupler
(1) Parallel concentration alarm output (On/Off)
(2) Switching chemical solution for measurement
(including background correction)
(3) Hot water correction
Parallel
output
Transistor output (NPN open collector) by insulating with photo coupler
Maximum current when powered ON: 5 mA DC (no internal protective resistance)
Maximum voltage when powered OFF: 30 V DC
(1) Concentration alarm (ON at HH/H/L/LL alarm)
(2) Monitor error (OFF at error)
(3) Measuring (ON at measurement)
(4) Chemical solution type for measurement
(5) Echo to hot water correction input
(6) Warning (ON at occurred)
(7) Background correction status 8) Hot water correction status
Serial input RS-232C
(1) Request for readout of measurement data
(2) Select chemical solution type to be measured
(3) Hot water correction
Serial
output

RS-232C
(1) Measured data No.
(2) Chemical solution type
(3) Concentration value
(4) Error code
(5) Chemical temperature

Analog
output
4 mA to 20 mA
In case of monitor error occurs, measurement is stopped or
invalid chemical range is selected, the signal output is fixed at 1.5 mA. The load resistor must be 500 Ω maximum.
Chemical solution
temperature input
Terminal block inlet (terminal screw M3)
Platinum resistance temperature sensor: Pt100
(Three-conductor type, Class A) *Temperature sensor is not included.
Air
(for operation and purge)
Connection port: 4 mm O.D. quick joint,
Pressure: 0.2 MPa ±0.02 Mpa
Power source 100~230V AC(Single-Phase)、50/60Hz
Power consumption Approx. 85 VA
(transient electric current at the time of the start is excluded)
Weight (Monitor) Approx. 3.6 kg
(Lamp unit) Approx. 2.8 kg
(Sample cell) Approx. 1.2 kg
Ambient temperature (Monitor, Lamp unit) 20°C to 30°C
(Sample cell, Optical fiber) 20°C to 35°C
(Sudden temperature change should be avoided, within ±1°C/1 hour)
Ambient humidity (Monitor, Lamp unit, Sample cell) 40% to 70%
(Should be no dew condensation)
Slanting angle at installation (Monitor, Lamp unit) within ±1°
Optical fiber Length: 5 m, minimum bend radius: R 150 mm
scrollable

Schematics

CS-600F-1P25P5
藥液濃度計CS-600F-1P25P5
HORIBA日本堀場
上一篇:PT2.5R-1004-I2-DA91
下一篇:遠程感應(yīng)器SX-10E2B

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